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Far-Infrared Interferometry

Luminous Flux Measurement System

Microscopic Moiré Interferometry

Portable Engineering Moiré Interferometry (PEMI)

Shadow Moiré Measurement System

Twyman/Green Interferometer

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Far-Infrared Interferometry

Specially designed to measure warpage without any sample preparation using CO2 laser as a light source (a contour interval of 5.3 m/fringe)

                Figure 2

                  Figure 1

Example: Thermal deformation of Tape Ball Grid Array

                             Figure 3