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Far-Infrared Interferometry

Luminous Flux Measurement System

Microscopic Moiré Interferometry

Portable Engineering Moiré Interferometry (PEMI)

Shadow Moiré Measurement System

Twyman/Green Interferometer

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Shadow Moiré Measurement System

The system is used to measure warpage of various semiconductor and photonics devices and assemblies.

Figure 1

Example: Thermal warpage of flip-chip package

Figure 2